JPH0442913Y2 - - Google Patents

Info

Publication number
JPH0442913Y2
JPH0442913Y2 JP18080084U JP18080084U JPH0442913Y2 JP H0442913 Y2 JPH0442913 Y2 JP H0442913Y2 JP 18080084 U JP18080084 U JP 18080084U JP 18080084 U JP18080084 U JP 18080084U JP H0442913 Y2 JPH0442913 Y2 JP H0442913Y2
Authority
JP
Japan
Prior art keywords
gas
valve
air
gas introduction
air valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18080084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6196538U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18080084U priority Critical patent/JPH0442913Y2/ja
Publication of JPS6196538U publication Critical patent/JPS6196538U/ja
Application granted granted Critical
Publication of JPH0442913Y2 publication Critical patent/JPH0442913Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Valve Housings (AREA)
  • Multiple-Way Valves (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Drying Of Semiconductors (AREA)
JP18080084U 1984-11-30 1984-11-30 Expired JPH0442913Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18080084U JPH0442913Y2 (en]) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18080084U JPH0442913Y2 (en]) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6196538U JPS6196538U (en]) 1986-06-21
JPH0442913Y2 true JPH0442913Y2 (en]) 1992-10-12

Family

ID=30738357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18080084U Expired JPH0442913Y2 (en]) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPH0442913Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004036099A1 (ja) * 2002-10-21 2004-04-29 Ckd Corporation ガス集積弁
JP2021008895A (ja) * 2019-06-28 2021-01-28 トーステ株式会社 分岐流路切換弁

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647073B2 (ja) * 1988-07-08 1994-06-22 忠弘 大見 プロセス装置用ガス供給配管装置
JPH0644986B2 (ja) * 1988-05-08 1994-06-15 忠弘 大見 プロセスガス供給配管装置
JPH11141713A (ja) * 1997-09-05 1999-05-28 Tetra Laval Holdings & Finance Sa 無菌弁組立体
JP7029314B2 (ja) * 2018-03-07 2022-03-03 株式会社Ｓｃｒｅｅｎホールディングス 薬液制御弁および基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004036099A1 (ja) * 2002-10-21 2004-04-29 Ckd Corporation ガス集積弁
JP2021008895A (ja) * 2019-06-28 2021-01-28 トーステ株式会社 分岐流路切換弁

Also Published As

Publication number Publication date
JPS6196538U (en]) 1986-06-21

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